P = 10, U = c + 1.33 log p, Gültig im bereich 1×10 – INFICON Gemini ATM to Ultra-High Vacuum Gauge Benutzerhandbuch
Seite 16: Mbar < p < 1×10, Mbar 7.5×10, Torr < p < 7.5 ×10, Torr 1×10, Druck p messsignal u [v
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16
tina83d1-a (2014-02)
Messbereich 0.667 … 10 V (3MAx-xxx-0x0Q)
1E–01
1E+00
1E–06
1E–07
1E–08
1E–09
1E–10
0.0 0.5 1.0 1.5
2.5
3.5
4.5
5.5
6.5
7.5
8.5
9.5
10.5
2.0
3.0
4.0
5.0
6.0
7.0
8.0
9.0
10.0
Druck p
Messsignal U [V]
1E–02
1E–03
1E–04
1E–05
Pa
mbar
torr
0.667
se
n
sor
er
ro
r
un
de
rr
an
ge
ov
er
ra
ng
e
p = 10
0.75(U-c)
⇔
U = c + 1.33 log p
Gültig im Bereich 1×10
-9
mbar < p < 1×10
-2
mbar
7.5×10
-10
Torr < p < 7.5 ×10
-3
Torr
1×10
-7
Pa < p < 1 Pa
mbar Pa Torr
c 12.66 10 12.826
wobei p Druck
U Messsignal
c Konstante (abhängig von der Druckeinheit)
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