Relay outputs – INFICON XTC/3 Thin Film Deposition Controller Operating Manual Benutzerhandbuch
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XTC/3 Gebrauchsanleitung
Abbildung 4-24 Relais Ausgänge 1
Abbildung 4-25 Relais Ausgänge 2
Abbildung 4-26 Relais Ausgänge 3
Relay Outputs
|
| <Blank> 1 Source Shut 1 NO
| Source Shut 1 2 Source Shut 2 NO
All I/O| Source Shut 2 3 Sensor Shut 1 NO
| Sensor Shut 1 4 Sensor Shut 2 NO
Inputs | Sensor Shut 2 5 Stop NO
| Stop 6 End of process NO
Relay
| End of Process 7 Thick Setpoint NO
| Thick Setpoint 8 Soak 2 NO
TTL | Soak 2 9 Crystal Fail NO
| Crystal Fail 10 Alarms NO
| Alarms 11 Source in use NO
| Source in use 12 Final Thick NO
| Final Tick
| <More>
Relay Outputs
|
| <Previous> 1 Source Shut 1 NO
| Final Thick 2 Source Shut 2 NO
All I/O| End of Film 3 Sensor Shut 1 NO
| In Layer 4 Sensor Shut 2 NO
Inputs | Ion Assist Dep 5 Stop NO
| Xtal Switch 1 6 End of Process NO
Relay
| Xtal Switch 2 7 Thick Setpoint NO
| Ready 8 Soak 2 NO
TTL | Rise 1 9 Crystal Fail NO
| Soak 1 10 Alarms NO
| Rise 2 11 Source in use NO
| Shutter Delay 12 Final Thick NO
| Deposit
| <More>
Relay Outputs
|
| <Previous> 1 Source Shut 1 NO
| Rate Ramp 2 Source Shut 2 NO
All I/O| Idle Ramp 3 Sensor Shut 1 NO
| Idle 4 Sensor Shut 2 NO
Inputs | Time Power 5 Stop NO
| Manual 6 End of Process NO
Relay
| Max Power 7 Thick Setpoint NO
| Rate Dev Fail 8 Soak 2 NO
TTL | Xtal Sw Fail 9 Crystal Fail NO
| Xtal Switching 10 Alarms NO
| Crucib Sw Fail 11 Source in use NO
| Crucib Switch 12 Final Thick NO
| ShutterDelFail
| <More>