INFICON XTC/3 Thin Film Deposition Controller Operating Manual - Handbuch (Seite 30)

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A
XTC/3 Gebrauchsanleitung
Abbildung 1-2 XTC/3S Operate Anzeige
0.0
Å/S
0.000
KÅ
0.0
%
READY
R +10 State mm:ss
A Source 1
T Sensor 1
E Crystal 1
D % Life 0
E S 0
V -10 Q Delay
Film 1 mm:ss
Status Messages Here
Stop
Status Transient Stop Cause